| 发明名称 |
PROBE CARD AND METHOD FOR PRODUCING A PROBE CARD |
| 摘要 |
A probe card for a wafer tester includes a mother card having a reinforcing element and at least one daughter card which is rigidly connected to the reinforcing element detachably. The mother card includes electrical contacts for producing an electrical connection with the wafer tester. The at least one daughter card includes electrical contact elements for making contact with an electrical circuit on a wafer. In addition, the mother card and the at least one daughter card are electrically detachably connected to one another via an electrical interface. |
| 申请公布号 |
US2015168456(A1) |
申请公布日期 |
2015.06.18 |
| 申请号 |
US201414571507 |
申请日期 |
2014.12.16 |
| 申请人 |
Infineon Technologies AG |
发明人 |
Dominizi Karl;Frank Oliver;Standner Klaus;Zielke Stefan |
| 分类号 |
G01R1/073;G01R1/04 |
主分类号 |
G01R1/073 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A probe card for a wafer tester, the probe card comprising:
a mother card comprising a reinforcing element; and at least one daughter card which is rigidly connected detachably to the reinforcing element, wherein the mother card comprises electrical contacts for producing an electrical connection with the wafer tester, wherein the at least one daughter card comprises electrical contact elements for making contact with an electrical circuit on a wafer, wherein the mother card and the at least one daughter card are electrically detachably connected to one another via an electrical interface. |
| 地址 |
Neubiberg DE |
