发明名称 HETEROGENEOUS MATERIAL INTEGRATION THROUGH GUIDED LATERAL GROWTH
摘要 <p>Methods are provided for generating a crystalline material. The methods comprise depositing a textured thin film in a growth seed area, wherein the textured thin film has a preferential crystallographic axis; providing a growth channel extending from the growth seed area, the growth channel permitting guided lateral growth; and growing a crystalline material in the growth channel along a direction that is substantially perpendicular to the preferential crystallographic axis of the textured thin film. A preferred crystalline material is gallium nitride, and preferred textured thin films are aluminum nitride and titanium nitride.</p>
申请公布号 WO2013158210(A3) 申请公布日期 2015.06.18
申请号 WO2013US26743 申请日期 2013.02.19
申请人 YALE UNIVERSITY 发明人 HAN, JUNG
分类号 C30B25/04 主分类号 C30B25/04
代理机构 代理人
主权项
地址