Surface Analysis Instrument

摘要

A surface analysis instrument is offered which can intelligibly display the results of a measurement. The surface analysis instrument (100) obtains a spectrum indicating a relationship between electron kinetic energy and detection intensity by irradiating a sample with an electron beam or X-rays and detecting electrons emanating from the sample. The instrument includes a detection depth calculating portion (76) for calculating the electron detection depth from the detected electron kinetic energy and a display controller (78) for providing control such that the spectrum and information about the electron detection depth calculated by the detection depth calculating portion (76) are displayed on a display device (82).

主权项

1. A surface analysis instrument for obtaining a spectrum by irradiating a sample with an electron beam or X-rays and detecting electrons emanating from the sample, said surface analysis instrument comprising:
a detection depth calculating portion for calculating a detection depth of electrons from kinetic energies of the detected electrons; and a display controller for providing control such that the spectrum and information about the detection depth of electrons calculated by the detection depth calculating portion are displayed on a display device.