SEAL MECHANISM, DRIVE DEVICE FOR SEAL MECHANISM, TRANSPORT DEVICE, AND MANUFACTURING DEVICE

摘要

A seal mechanism that separates two spaces having different pressures, said seal mechanism being equipped with: a housing; a shaft inserted into the housing; an annular seal member that makes contact with the radially outside surface of the shaft or with the radially outside surface of a rotary part affixed to the shaft, thereby sealing a gap; and a lubricant groove storing a lubricant supplied between the annular seal member and the radially outside surface.