发明名称 METHOD OF DEPOSITION OF HIGHLY SCRATCH-RESISTANT DIAMOND FILMS ONTO GLASS SUBSTRATES BY USE OF A PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
摘要 <p>A system and process for inter alia coating or creating a substrate with a layer of carbon or diamond film using a microwave field and a hydrocarbon gas environment. The carbon or diamond film creates a stronger and more scratch resistant substrate that is less prone to breaking or cracking. Additionally, the coating may provide superior heat transfer properties enabling the final device to be used in passive cooling applications such as for mobile phone displays.</p>
申请公布号 WO2015088681(A1) 申请公布日期 2015.06.18
申请号 WO2014US64508 申请日期 2014.11.07
申请人 RUBICON TECHNOLOGY, INC. 发明人 CIRALDO, JOHN, P.
分类号 C23C16/26 主分类号 C23C16/26
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