METHOD FOR TRANSPORTING BRITTLE MATERIAL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a transportation method in which a substrate having functional regions formed by being aligned in the longitudinal direction and the lateral direction is broken, and the functional regions and regions becoming an end material of the periphery thereof are transported while being collected separately, respectively.SOLUTION: Functional regions in the central part of a brittle material substrate 90 are absorbed at a head part 30 by a first transport head 13 and transported in the direction of a beam 11 by a linear slider 12. Regions becoming an end material of the periphery are collectively absorbed at a head part 50 by a second transport head 14 and transported in the direction of the beam 11 by the linear slider 12.