发明名称 |
INTEGRATED CAPACITOR AND METHOD FOR PRODUCING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide an integrated capacitor which works on a higher operation voltage.SOLUTION: An integrated capacitor 10 comprises: a substrate 16 having a first main surface area and a second main surface area opposed to the first main surface area; a capacitor structure 12 with a dielectric layer 18, which is integrated in the first main surface area; and a compensation structure 14 with a compensation layer 28, which is integrated in the second main surface area. The ratio between a surface enlargement of the second main surface area effected by the compensation structure corresponds to at least 30% of the surface enlargement of the first main surface area effected by the capacitor structure. |
申请公布号 |
JP2015111671(A) |
申请公布日期 |
2015.06.18 |
申请号 |
JP20140236165 |
申请日期 |
2014.11.21 |
申请人 |
FRAUNHOFER GES ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV |
发明人 |
ANTON BAUER;TOBIAS ERLBACHER;HOLGER SCHWARZMANN |
分类号 |
H01L21/822;H01L27/04 |
主分类号 |
H01L21/822 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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