发明名称 INTEGRATED CAPACITOR AND METHOD FOR PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an integrated capacitor which works on a higher operation voltage.SOLUTION: An integrated capacitor 10 comprises: a substrate 16 having a first main surface area and a second main surface area opposed to the first main surface area; a capacitor structure 12 with a dielectric layer 18, which is integrated in the first main surface area; and a compensation structure 14 with a compensation layer 28, which is integrated in the second main surface area. The ratio between a surface enlargement of the second main surface area effected by the compensation structure corresponds to at least 30% of the surface enlargement of the first main surface area effected by the capacitor structure.
申请公布号 JP2015111671(A) 申请公布日期 2015.06.18
申请号 JP20140236165 申请日期 2014.11.21
申请人 FRAUNHOFER GES ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV 发明人 ANTON BAUER;TOBIAS ERLBACHER;HOLGER SCHWARZMANN
分类号 H01L21/822;H01L27/04 主分类号 H01L21/822
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