发明名称 SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a configuration that can suppress increase in oxygen deficiency in an oxide semiconductor layer, and to provide a method of producing the same.SOLUTION: A semiconductor device is configured to have: an oxide insulating layer; an interlayer formed separately on the oxide insulating layer; a source electrode layer and a drain electrode layer formed on the interlayer; an oxide semiconductor layer having electrical connection with each of the source electrode layer and the drain electrode layer, and contacted with the oxide insulating layer; a gate insulating film formed on the source electrode layer, the drain electrode layer, and the oxide semiconductor layer; and a gate electrode layer formed on the gate insulating film so as to be overlapped with the source electrode layer, the drain electrode layer, and the oxide semiconductor layer.
申请公布号 JP2015111666(A) 申请公布日期 2015.06.18
申请号 JP20140222545 申请日期 2014.10.31
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 HANAOKA KAZUYA;KUSUMOTO NAOTO
分类号 H01L29/786;H01L21/28;H01L21/336;H01L21/8242;H01L21/8247;H01L27/108;H01L27/115;H01L29/788;H01L29/792;H01L51/50;H05B33/14 主分类号 H01L29/786
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