PROCESS FOR FORMING EDGE WORDLINE IMPLANTS ADJACENT EDGE WORDLINES

摘要

A process for forming tilted edge wordline implants is disclosed. The process includes forming a first drain implant in a substrate, forming a first tilted implant in a substrate adjacent a first edge wordline to supplement said first drain implant where the first tilted implant is provided at a tilt angle from a first direction and forming a second tilted implant in the substrate adjacent a second edge wordline to supplement another first drain implant where the second tilted implant is provided at a tilt angle from a second direction. A second drain implant is formed in the substrate.

主权项

1. A method for forming tilted edge wordline implants, said method comprising:
forming a first drain implant in a substrate; forming a first tilted implant in a substrate adjacent a first edge wordline to supplement said first drain implant wherein said first tilted implant is provided at a tilt angle from a first direction; forming a second tilted implant in said substrate adjacent a second edge wordline to supplement the first drain implant wherein said second tilted implant is provided at a tilt angle from a second direction; and forming a second drain implant in said substrate.