| 摘要 |
PROBLEM TO BE SOLVED: To provide an ashing method and an ashing device capable of performing required ashing reliably for a processed object.SOLUTION: An ashing method has a step for irradiating vacuum ultraviolet ray through a light transmission window, to a processed object arranged to face the light transmission window transmitting the vacuum ultraviolet ray, while supplying process gas containing an active species source in the gap between the light transmission window and processed object. The gap between the light transmission window and processed object is 1 mm or less, and the flow rate of process gas distributed through the gap is controlled to 1-100 mm/sec. |
