DIFFERENTIAL IMAGING WITH PATTERN RECOGNITION FOR PROCESS AUTOMATION OF CROSS SECTIONING APPLICATIONS

摘要

PROBLEM TO BE SOLVED: To provide an improved method for endpointing that allows an operator to observe samples so as to visually distinguish slices with a focused ion beam system.SOLUTION: Differential imaging is used for applications involving TEM samples by allowing operators to take multiple images during a procedure involving an FIB procedure and by overlaying the multiple images to create a differential image that clearly shows differences between milling steps. The methods also involve generating real-time images of the area being milled and using the overlays of the differential images to show small changes in each image and thus highlight the ion beam milling location. The methods also involve automating the process of creating differential images and using the differential images to automatically mill subsequent slices.