CARRIER HEAD HAVING ABRASIVE STRUCTURE ON RETAINER RING

摘要

A carrier head includes a housing configured to enclose a wafer and a retainer ring attached to the housing. The retainer ring includes a body and an abrasive structure. The body includes an inner periphery configured to surround the wafer, an outer periphery, and a surface connecting the inner periphery and the outer periphery. The abrasive structure is attached to the surface of the body.

主权项

1. A carrier head comprising:
a housing configured to enclose a wafer; and a retainer ring attached to the housing, the retainer ring comprising:
a body, comprising:
an inner periphery configured to surround the wafer;an outer periphery; anda surface connecting the inner periphery and the outer periphery; andan abrasive structure attached to the surface of the body.