METHOD FOR OBTAINING A NANO CAPSULE STRUCTURE

摘要

The method for obtaining a nano-capsule structure includes at least one layer of resin deposited on a layer of substrate. The capsule nanometric in size is capable of enabling the encapsulation of a compound. The layer of resin is structured, by low voltage electron lithography, or by optical lithography or by nanoimprinting in such a way as to obtain at least one cavity in the thickness of the layer of resin. The cavity has a depth smaller than the thickness of the layer of resin. At least one layer of an encapsulating material is isotropically deposited by sputtering the material under vacuum. The cavity is sealed with a sealing material. The layer of resin is dissolved by soaking in a suitable solvent.

主权项

1. A method for obtaining at least one nano-capsule structure, wherein at least one capsule is nanometric in size and encapsulates a compound, said method comprising the following steps:
depositing at least one layer of resin on a layer of substrate; structuring said layer of resin by one of a group consisting of: low-voltage electron lithography, optical lithography and nanoimprinting; forming at least one cavity in a thickness of said layer of resin, the cavity having a depth smaller than said thickness of said layer of resin; sputtering an encapsulating material under vacuum so as to form an isotropic deposition of at least one layer of act said encapsulating material; sealing the cavity with a sealing material; and dissolving said layer of resin by soaking into a suitable solvent.