| 摘要 |
A lid-opening/closing device includes a device body on which a pod including a container body, a lid portion defining a bottom portion openable and closable relative to the container body, and a locking mechanism performing unlocking and locking of the lid portion with respect to the container body is placed; a plurality of moving units that perform unlocking to cause the locking mechanism to perform unlocking and locking to cause the locking mechanism to perform locking by moving engaging pins configured to engage with the locking mechanism; a linkage unit that causes the moving units to perform unlocking by moving the moving units in conjunction with each other when causing the locking mechanism to perform unlocking, and causes the moving units to perform locking by moving the moving units in conjunction with each other when causing the locking mechanism to perform the locking; and an air cylinder that simultaneously drives the moving units and the linkage unit. |
