发明名称 |
OPTOMECHANICAL INERTIAL SENSOR |
摘要 |
<p>Embodiments of the present disclosure are directed towards techniques and configurations for MEMS sensing device configured to determine inertial change applied to the device. In one instance, the device may comprise a laser arrangement configured to generate a light beam, and a waveguide configured to split the light beam into two portions. The waveguide may include two arms through which the respective portions of the light beam may respectively pass, and disposed substantially parallel with each other and joined together around their respective ends to recombine the portions into a light beam. One of the arms may be deformable. A deformation of the arm may result in a change of an optical path length of a portion of the light beam traveling through the arm, causing a detectable change in light intensity of the recombined light beam outputted by the waveguide. Other embodiments may be described and/or claimed.</p> |
申请公布号 |
WO2015088724(A1) |
申请公布日期 |
2015.06.18 |
申请号 |
WO2014US66462 |
申请日期 |
2014.11.19 |
申请人 |
INTEL CORPORATION |
发明人 |
HUTCHISON, DAVID N.;HECK, JOHN |
分类号 |
G01P15/14;B81B7/02;G01C19/5656;G01P15/02 |
主分类号 |
G01P15/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|