SOLID STATE LIGHT EMITTING DEVICES BASED ON CRYSTALLOGRAPHICALLY RELAXED STRUCTURES

摘要

The present invention discloses a method for manufacturing a solid state light emitting device having a plurality of light-sources, the method comprising the steps of: providing a substrate having a growth surface; providing a mask layer on the growth surface, the mask layer having a plurality of openings through which the growth surface is exposed, wherein a largest lateral dimension of each of said openings is less than 0.3 μm and wherein the mask layer may comprise a first mask layer portion and a second mask layer portion, having the same surface area and comprising a plurality of openings wherein the first mask layer portion exhibits a first ratio between an exposed area of the growth surface and an unexposed area of the growth surface, and wherein the second mask layer portion exhibits a second ratio between an exposed area of the growth surface and an unexposed area of said growth surface, the second ratio being different from the first ratio; growing a base structure on the growth surface in each of the openings of the mask layer; and growing at least one light-generating quantum well layer on the surface of each of the base structures.

主权项

1. A method comprising:
growing a base layer over a growth substrate; growing a light emitting layer over the base layer, wherein growing a light emitting layer comprises:
providing a first quantity of precursor material over a first region of the base layer;providing a second quantity of precursor material over a second region of the base layer, wherein the second quantity is greater than the first quantity; andsimultaneously growing a first portion of the light emitting layer over the first region and a second portion of the light emitting layer over the second region, wherein the second portion is thicker than the first portion.