发明名称 ELECTROMAGNETIC MIXING FOR NITRIDE CRYSTAL GROWTH
摘要 <p>A method and apparatus for bulk Group-Ill nitride crystal growth through inductive stirring in a sodium flux growth technique. A helical electromagnetic coil is closely wound around a non-conducting cylindrical crucible containing a conductive crystal growth solution, including both precursor gallium and sodium, wherein a nitrogen-containing atmosphere can be maintained at any pressure. A seed crystal is introduced with the crystal's growth interface submerged slightly below the solution's surface. Electrical contact is made to the coil and an AC electrical field is applied at a specified frequency, in order to create eddy currents within the conductive crystal growth solution, resulting in a steady-state flux of solution impinging on the submerged crystal's growth interface.</p>
申请公布号 WO2013126899(A3) 申请公布日期 2015.06.18
申请号 WO2013US27669 申请日期 2013.02.25
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;VON DOLLEN, PAUL 发明人 VON DOLLEN, PAUL
分类号 H01L21/331 主分类号 H01L21/331
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