| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method with which an image for inspecting the surface of an object can be more suitably photographed on the basis of the surface shape of the object even when the surface of the object has abnormality. ! SOLUTION: There is provided an inspection device including: a correlation coefficient calculation unit that derives an approximate expression representing the shape of the surface of an object on the basis of information indicating focal positions of an imaging unit as to a plurality of imaging target points on the surface of the object, and calculates the correlation coefficient between the derived approximate expression and the focal positions; and a determination unit that determines that the focal positions have abnormality when the correlation coefficient calculated by the correlation coefficient calculation unit is less than a predetermined threshold. ! COPYRIGHT: (C)2015,JPO&INPIT |
