发明名称 PERSULFATE BATH AND METHOD FOR CHEMICALLY DEPOSITING A LAYER
摘要 The invention relates to a chemical bath for depositing a layer made from at least metal and sulphur. It also relates to a method for depositing such a layer. The bath comprises, in solution: - a metal salt comprising a metal chosen from at least one of the elements from groups IIB and IIIA of the periodic table; and - a sulphur precursor. The bath further comprises a persulfate compound.
申请公布号 WO2015086987(A1) 申请公布日期 2015.06.18
申请号 WO2014FR53248 申请日期 2014.12.09
申请人 ELECTRICITE DE FRANCE;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - CNRS - 发明人 HILDEBRANDT, THIBAUD;NAGHAVI, NEGAR;LOONES, NICOLAS;SCHNEIDER, NATHANAELLE
分类号 C23C18/12;H01L31/18 主分类号 C23C18/12
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