发明名称 CARRIER GLASS REMOVER
摘要 <p>A carrier glass remover is disclosed. The carrier glass remover according to the present invention comprises: an adsorbing unit having an adsorbing module for performing a vacuum adsorption of a glass-bonded substrate made by bonding a carrier glass with one side of a flexible substrate; an edge area disassembling unit placed near the adsorbing unit for disassembling the flexible substrate from the carrier glass in an edge area of the glass-bonded substrate; a stage unit having an adsorbing stage placed to face the adsorbing module for performing a vacuum adsorption of the glass-bonded substrate; and a removing unit placed on at least one of the adsorbing units and the stage unit for tilting one of the adsorbing module and the adsorbing stage to the other and removing the carrier glass from the flexible substrate.</p>
申请公布号 KR101530036(B1) 申请公布日期 2015.06.18
申请号 KR20130165273 申请日期 2013.12.27
申请人 SFA ENGINEERING CORP.;SAMSUNG DISPLAY CO., LTD. 发明人 KEUM, JAE YOUL;YEO, IN TACK
分类号 B65G49/06;G02F1/13;H01L21/677;H01L51/56 主分类号 B65G49/06
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