发明名称 DEVICE AND METHOD FOR COATING, AND METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE
摘要 PROBLEM TO BE SOLVED: To form a coating film with an even thickness stably while reducing generation of film breakage.SOLUTION: A coating device 1 includes: a discharge part 24 that includes a discharging slit 241As and discharges a solution L1 from a discharge port 241Ao of the discharging slit 241As to apply the solution to an application object 4; and a guide member 25 that is provided in the vicinity of both end parts of the discharge port 241Ao in the discharge part 24 so as to protrude from the discharge part 24 and bendable in a first direction orthogonal to an extending direction of the discharge port 241Ao and parallel to an application surface of the application object 4.
申请公布号 JP2015110207(A) 申请公布日期 2015.06.18
申请号 JP20140029825 申请日期 2014.02.19
申请人 KYOCERA CORP 发明人 KIKUCHI MICHIMASA
分类号 B05C5/00;B05D1/26;H01L31/06 主分类号 B05C5/00
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