| 摘要 |
PROBLEM TO BE SOLVED: To provide a film deposition apparatus for a composite film which is effective for preventing cross contamination between a plurality of chambers when simultaneously and continuously depositing a film in the chambers. ! SOLUTION: A film deposition apparatus includes a plurality of chambers separated by a partition, and a movable part which can move across the chambers. The movable part includes means for holding a process object. Each chamber includes means for holding a target which serves as decompression evacuation means, gas introduction means, and a vapor source. The film deposition apparatus includes seal means for sealing a direct or indirect gap formed between the movable part and the partition or a chamber inner wall while allowing slide movement of the movable part in the gap. ! COPYRIGHT: (C)2015,JPO&INPIT |
