发明名称 METHOD FOR FORMING SEMICONDUCTOR PACKAGE USING CARBON NANO MATERIAL IN MOLDING COMPOUND
摘要 A method of forming a semiconductor package includes growing a layer of carbon nano material on a chip. The chip has a first surface and a second surface and the layer of carbon nano material is grown on the first surface of the chip. The layer of carbon nano material is configured to provide a path through which heat generated from the chip is dissipated. A substrate is attached to the second surface of the chip. A molding compound is formed above the substrate to encapsulate the chip and the layer of carbon nano material.
申请公布号 US2015170990(A1) 申请公布日期 2015.06.18
申请号 US201314132407 申请日期 2013.12.18
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 TSENG Chun-Hao;KUO Ying-Hao;YEE Kuo-Chung
分类号 H01L23/34;H01L23/498;H01L21/56 主分类号 H01L23/34
代理机构 代理人
主权项 1. A method of forming a semiconductor package, comprising: growing a layer of carbon nano material on a chip, the chip having a first surface and a second surface, the layer of carbon nano material being grown on the first surface of the chip, wherein the layer of carbon nano material is configured to provide a path through which heat generated from the chip is dissipated; attaching a substrate to the second surface of the chip; and forming a molding compound above the substrate to encapsulate the chip and the layer of carbon nano material.
地址 Hsinchu TW