| 发明名称 |
SEGMENTED ANTENNA ASSEMBLY |
| 摘要 |
A segmented antenna assembly for use in a plasma enhanced chemical vapor deposition (PECVD) apparatus. One embodiment provides an apparatus comprising a chamber body having a top surface and a bottom surface, an antenna comprising a first segment, a second segment electrically coupled to the first segment and extending through an interior volume of the chamber, and a third segment electrically coupled to the second segment, and a dielectric layer disposed around an outer diameter of the second segment. |
| 申请公布号 |
US2015173166(A1) |
申请公布日期 |
2015.06.18 |
| 申请号 |
US201314371412 |
申请日期 |
2013.01.11 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
Johnston Benjamin M. |
| 分类号 |
H05H1/46 |
主分类号 |
H05H1/46 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus, comprising:
a chamber body having a top surface and a bottom surface; an antenna comprising:
a first segment;a second segment, electrically coupled to the first segment and extending through an interior volume of the chamber; anda third segment, electrically coupled to the second segment; and a dielectric layer disposed around an outer diameter of the second segment. |
| 地址 |
Santa Clara CA US |
