发明名称 USE OF DIELECTRIC FILM TO REDUCE RESISTIVITY OF TRANSPARENT CONDUCTIVE OXIDE IN NANOWIRE LEDS
摘要 <p>Various embodiments include methods of fabricating light emitting diode (LED) devices, such as nanowire LED devices, that include forming a layer of a transparent, electrically conductive material over at least a portion of a non-planar surface of an LED device, and depositing a layer of a dielectric material over at least a portion of the layer of transparent conductive material, wherein depositing the layer of dielectric material comprises at least one of: (a) depositing the layer using a chemical vapor deposition (CVD) process, (b) depositing the layer at a temperature of 200°C or more, and (c) depositing the layer using one or more chemically active precursors for the dielectric material.</p>
申请公布号 WO2015089123(A1) 申请公布日期 2015.06.18
申请号 WO2014US69429 申请日期 2014.12.10
申请人 GLO AB;HERNER, SCOTT BRAD;THOMPSON, DANIEL BRYCE 发明人 HERNER, SCOTT BRAD;THOMPSON, DANIEL BRYCE
分类号 H01L33/20 主分类号 H01L33/20
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