| 发明名称 |
DEVICES AND METHODS FOR PARAMETER MEASUREMENT |
| 摘要 |
A thin-film, diaphragm based device is disclosed which can be used to perform an array of sensing and actuating operations where a very thin profile is desired, such as in millimeter, micrometer, or nanometer tight spaces. |
| 申请公布号 |
WO2015089175(A1) |
申请公布日期 |
2015.06.18 |
| 申请号 |
WO2014US69525 |
申请日期 |
2014.12.10 |
| 申请人 |
THE BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM |
发明人 |
STARR, PETER;BAILEY, STEVEN;AGRAWAL, MAULI |
| 分类号 |
A61B5/021 |
主分类号 |
A61B5/021 |
| 代理机构 |
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