| 摘要 |
<p>Disclosed are an evaporation source conveying unit, an evaporation device, and an evaporation method. According to one aspect of the present invention, provided is the evaporation source conveying unit which is an evaporation source conveying unit arranged in a deposition chamber and conveying a linear evaporation source, comprising: a lower rail including a first linear rail perpendicular to a first virtual radial direction crossing the deposition chamber at one center point, a second linear rail perpendicular to a second virtual radial direction crossing the deposition chamber at the center point, and a third curved rail connecting the first rail and the second rail; an upper rail including a fourth linear rail which is spaced from the first rail and parallel thereto, a fifth linear rail which is spaced from the second rail and parallel thereto, and a sixth curved rail for connecting the fourth rail and the fifth rail; and a conveying part coupled such that the linear evaporation source is perpendicular to the lower rail and the upper rail and reciprocatingly moves along the lower rail and the upper rail.</p> |
