| 摘要 |
<p>An existing magnetic device using a permanent magnet cannot adjust an intensity of magnetic field since the permanent magnet is fixed and only the determined magnetic field is applied. In addition, in order to find an optimal magnetic field distribution condition, countless test products have to be made and tested. In order to solve such a problem, the present invention relates to a magnetic field device in which a permanent magnet is movable. The magnetic field device in which the permanent magnet is movable has an effect capable of adjusting the intensity of the magnetic field in a plasma generating technique requiring magnetic field, and is directly applicable to all devices requiring magnetic field such as a semiconductor processing device and an accelerator ion source. In addition, resistance heat of I_2R is generated due to a high current DC power supply system necessary to allow electric current to flow in an electronic magnet and a flow of high current which are problems represented in an electronic magnetic field device, and a separate cooling device is not necessary in the present invention.</p> |
