发明名称 半導体装置及びその製造方法
摘要 <p>According to one embodiment, a semiconductor device includes a semiconductor substrate, wiring lines formed above the semiconductor substrate, and an air gap formed between the adjacent wiring lines. In the semiconductor device, top surfaces and side walls of the wiring lines are covered with the diffusion prevention film, and the air gap is in contact with the interconnects via a diffusion prevention film.</p>
申请公布号 JP5734757(B2) 申请公布日期 2015.06.17
申请号 JP20110134043 申请日期 2011.06.16
申请人 发明人
分类号 H01L21/768;H01L21/28;H01L23/532 主分类号 H01L21/768
代理机构 代理人
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