| 摘要 |
<p>A dielectric layer (33) is formed on the upper surface of a fixed electrode (32), and a recess (34) is provided in the surface of the dielectric layer (33). An upper substrate (37) is layered on the surface of the dielectric layer (33) so as to cover the recess (34), and a conductive diaphragm (38) (part of the upper substrate (37)) having a thin film form is disposed over the recess (34). A first contact surface (35) and a second contact surface (36) for making contact with the diaphragm (38) are formed on the surface of the dielectric layer (33) within the recess (34). The first contact surface (35) and the second contact surface (36) are, for example, horizontal surfaces, and the first contact surface (35) and the second contact surface (36) are separated by a step, which is a vertical surface. The second contact surface (36) is in a position higher than the first contact surface (35).</p> |
