发明名称 |
EXPOSING APPARATUS FOR FLAT PANEL DISPLAY |
摘要 |
The present invention relates to an exposure device for a flat display panel. An exposure device for a flat display panel according to the present invention is composed of: a mask stage and a board stage where a mask and a board are mounted; a lighting unit that radiates lights to the mask; a first optical unit; a second optical unit located at the first optical unit and an optical unit located between the mask stage and the board stage. The optical unit is composed of a first sealing unit formed inside the first optical unit and a second sealing unit formed to reach part of the outer side of the second optical unit from part of the outer side of the first optical unit. As a result, exposure stains caused by air flow changes can be prevented. |
申请公布号 |
KR20150066634(A) |
申请公布日期 |
2015.06.17 |
申请号 |
KR20130151491 |
申请日期 |
2013.12.06 |
申请人 |
LG DISPLAY CO., LTD. |
发明人 |
SEO, HYUN SIK;LEE, CHUNG HO;KIM, DAE YOUNG;LEE, JIN GU |
分类号 |
G03F7/20;G02F1/13 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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