发明名称 EXPOSING APPARATUS FOR FLAT PANEL DISPLAY
摘要 The present invention relates to an exposure device for a flat display panel. An exposure device for a flat display panel according to the present invention is composed of: a mask stage and a board stage where a mask and a board are mounted; a lighting unit that radiates lights to the mask; a first optical unit; a second optical unit located at the first optical unit and an optical unit located between the mask stage and the board stage. The optical unit is composed of a first sealing unit formed inside the first optical unit and a second sealing unit formed to reach part of the outer side of the second optical unit from part of the outer side of the first optical unit. As a result, exposure stains caused by air flow changes can be prevented.
申请公布号 KR20150066634(A) 申请公布日期 2015.06.17
申请号 KR20130151491 申请日期 2013.12.06
申请人 LG DISPLAY CO., LTD. 发明人 SEO, HYUN SIK;LEE, CHUNG HO;KIM, DAE YOUNG;LEE, JIN GU
分类号 G03F7/20;G02F1/13 主分类号 G03F7/20
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