发明名称 重合体及び感放射線性組成物
摘要 A radiation-sensitive composition includes (A) an acid-dissociable group-containing polymer, and (B) a radiation-sensitive acid generator. The acid-dissociable group-containing polymer (A) includes a polymer that includes a repeating unit shown by a general formula (1) in which R1 represents a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group, R2 represents a substituted or unsubstituted aryl group having 6 to 22 carbon atoms, Y represents a carbon atom, and X represents an atomic group that forms an alicyclic hydrocarbon group together with Y.
申请公布号 JP5737174(B2) 申请公布日期 2015.06.17
申请号 JP20110500651 申请日期 2010.02.18
申请人 JSR株式会社 发明人 丸山 研;甲斐 敏之
分类号 C08F20/16;C08F212/04;C08F220/16;C08F220/54;G03F7/004;G03F7/039 主分类号 C08F20/16
代理机构 代理人
主权项
地址