| 摘要 |
A detection device that detects a mark provided on the back side of an object (3), the detection device includes a first detection unit (16) configured to detect the mark from a surface side of the object (3); a second detection unit (41) configured to detect a surface position of the object (3); and a processing unit (P). The processing unit (P) determines a thickness of the object (3) based on a difference between a first focus position acquired with reference to the position of the mark detected by the first detection unit (16) and a second focus position acquired with reference to the surface position detected by the second detection unit (41). |
