发明名称 |
MEMBER WITH REFLECTION PREVENTING FUNCTION AND MANUFACTURING METHOD THEREOF |
摘要 |
<p>The present invention provides a member with a reflection preventing function and a manufacturing method thereof which can obtain a reflection preventing structure in the shape of a uniform minute bump by evenly forming a thin aluminum oxide film on a base material. The member (10) having a reflection preventing function comprises: a base material (11); and a reflection preventing film (13) formed on the surface of the base material (11). The minute bump structure of the reflection preventing film (13) is formed by performing a heated processing with hot water or steam with a high temperature on an aluminum oxide film formed by an atomic layer sedimentation.</p> |
申请公布号 |
KR20150067057(A) |
申请公布日期 |
2015.06.17 |
申请号 |
KR20140174955 |
申请日期 |
2014.12.08 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
SENBA SHOHEI;SUEKI HIDEHITO |
分类号 |
G02B1/11 |
主分类号 |
G02B1/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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