发明名称 MEMBER WITH REFLECTION PREVENTING FUNCTION AND MANUFACTURING METHOD THEREOF
摘要 <p>The present invention provides a member with a reflection preventing function and a manufacturing method thereof which can obtain a reflection preventing structure in the shape of a uniform minute bump by evenly forming a thin aluminum oxide film on a base material. The member (10) having a reflection preventing function comprises: a base material (11); and a reflection preventing film (13) formed on the surface of the base material (11). The minute bump structure of the reflection preventing film (13) is formed by performing a heated processing with hot water or steam with a high temperature on an aluminum oxide film formed by an atomic layer sedimentation.</p>
申请公布号 KR20150067057(A) 申请公布日期 2015.06.17
申请号 KR20140174955 申请日期 2014.12.08
申请人 TOKYO ELECTRON LIMITED 发明人 SENBA SHOHEI;SUEKI HIDEHITO
分类号 G02B1/11 主分类号 G02B1/11
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