发明名称 気相成長を介して連続的な銅薄膜を形成する方法
摘要 <p>A process for preparing a multi-layer substrate is described herein. In one embodiment, the process provides a multi-layer substrate comprising a first layer and a second layer where the process comprises the steps of providing the first layer comprising a barrier area and a copper area; and depositing the second layer comprising copper onto the first layer wherein the depositing provides the second layer comprising a first thickness ranging from about 20 Angstroms to about 2,000 Angstroms onto the barrier area and a second thickness ranging from about 0 Angstroms to about 1,000 Angstroms onto the copper area in the first layer wherein the first thickness is greater than the second thickness.</p>
申请公布号 JP5735593(B2) 申请公布日期 2015.06.17
申请号 JP20130178345 申请日期 2013.08.29
申请人 发明人
分类号 H01L21/285;C23C16/18;H01L21/3205;H01L21/768;H01L23/532 主分类号 H01L21/285
代理机构 代理人
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