| 摘要 |
<p>A method to control processing of lots of workpieces comprises the steps of: processing each of a plurality of lots with at least one first equipment; and transferring some of the plurality of lots. For each of a plurality of second equipment, predictive dispatch time of a following or more lots for process by the second equipment is determined. Each of the lots in a first storage is assigned to the second equipment of a plurality of second equipment based on at least determined predictive dispatch times, and is transferred to a second storage of a plurality of second storages relating to the second equipment in which each lot is assigned of the plurality of second equipment. For each of the plurality of second equipment, each lot in the second storage relating to the second equipment is transferred to the second equipment, and processed with the second equipment.</p> |
