| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate storage container which improves the dimensional accuracy of a support member supporting a substrate and suppresses the probability of the deflection of the support member even if the substrate is large and heavy. <P>SOLUTION: A substrate storage container is formed by incorporating and fixing a support member 30 supporting a semiconductor wafer to a container body which may house the semiconductor wafer through a fixing member 60. The support member 30 is composed of: an attachment wall 31 attached to a side wall of the container body; multiple first support pieces 39 disposed at a surface front part of the attachment wall 31 and horizontally supporting the peripheral front side of a side part of the semiconductor wafer; and multiple second support pieces 45 disposed at a surface rear part of the attachment wall 31 and horizontally supporting the peripheral rear side of the side part of the semiconductor wafer. The attachment wall 31 and the first and second support pieces 39, 45 are formed as separated bodies. Each first support piece 39 is composed of: an insertion part 40 inserted into the surface front part of the attachment wall 31 to be supported therein; and a support extending part 42 for the semiconductor wafer which extends from the insertion part 40 inward of the container body. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
