发明名称 単結晶基板、それを用いて得られるIII族窒化物結晶及びIII族窒化物結晶の製造方法
摘要 Provided is a base substrate with which a Group-III nitride crystal having a large area and a large thickness can be grown while inhibiting crack generation. A single-crystal substrate for use in growing a Group-III nitride crystal thereon, which satisfies the following expression (1), wherein Z1 (µm) is an amount of warpage of physical shape in a growth surface of the single-crystal substrate and Z2 (µm) is an amount of warpage calculated from a radius of curvature of crystallographic-plane shape in a growth surface of the single-crystal substrate: -40<Z2/Z1<-1 : Expression (1).
申请公布号 JP5737189(B2) 申请公布日期 2015.06.17
申请号 JP20110550004 申请日期 2011.01.13
申请人 三菱化学株式会社 发明人 藤戸 健史;内山 泰宏
分类号 C30B29/38;C23C16/34;C30B25/20;H01L21/205 主分类号 C30B29/38
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