| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an electromechanical conversion film having excellent crystallinity and electrical property. <P>SOLUTION: A method of manufacturing an electromechanical conversion film includes the steps of: subjecting a lower electrode formed on a substrate 1 to surface modification in a predetermined pattern with a SAM material 2; applying sol gel liquid 6 to an area on the lower electrode and not subjected to the surface modification by an ink-jet method 5; and heat-treating the sol gel liquid 6 with irradiation of an infrared ray from both sides of the substrate 1. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
