发明名称 TERMINAL FOR MECHANICAL SUPPORT OF A HEATING ELEMENT
摘要 A terminal for mechanical support of a heating element, includes a base device, a mounting device, the mounting device adapted to support the heating element, and a support device connecting the base device to the mounting device, the support device allowing displacement of the heating element about a radial axis and less than about 10% displacement of the heating element about a tangential and/or axial axis.
申请公布号 EP2882883(A1) 申请公布日期 2015.06.17
申请号 EP20130752822 申请日期 2013.08.05
申请人 PLANSEE SE;VEECO INSTRUMENTS INC. 发明人 PLANKENSTEINER, ARNO;FEIST, CHRISTIAN;BOGUSLAVSKIY, VADIM;GURARY, ALEXANDER I.;CHANG, CHENGHUNG PAUL
分类号 C23C16/458;C23C16/46;H01L21/67 主分类号 C23C16/458
代理机构 代理人
主权项
地址