发明名称 Retaining ring with frustoconical bottom surface
摘要 A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
申请公布号 EP2883656(A1) 申请公布日期 2015.06.17
申请号 EP20150150653 申请日期 2004.11.12
申请人 APPLIED MATERIALS, INC. 发明人 CHEN, HUNG CHIH;ZUNIGA, STEVEN M.;GARRETSON, CHARLES C.;MCALLISTER, DOUGLAS R.;MEYER, STACY;LIN, JIAN;HUEY, SIDNEY P.;OH, JEONGHOON;DOAN, TRUNG T.;SCHMIDT, JEFFREY;WOHLERT, MARTIN S.;HUGHES, KERRY F.;WANG, JAMES C.;LU, DANIEL CAM TOAN;DELAMENIE, ROMAIN BEAU;BALAGANI, VENKATA R.;ALLEN, ADEN MARTIN;FONG, MICHAEL JON
分类号 B24B37/04;B24B37/32 主分类号 B24B37/04
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