Oxide thin film transistor and method of fabricating the same

摘要

An oxide thin film transistor (TFT) and a fabrication method thereof are provided. First and second data wirings are made of different metal materials, and an active layer is formed on the first data wiring to implement a short channel, thus enhancing performance of the TFT. The first data wiring in contact with the active layer is made of a metal material having excellent contact characteristics and the other remaining second data wiring is made of a metal material having excellent conductivity, so as to be utilized to a large-scale oxide TFT process. Also, the first and second data wirings may be formed together by using half-tone exposure, simplifying the process.

主权项

1. An oxide thin film transistor (TFT) comprising:
a gate electrode on a substrate; a gate insulating film on the gate electrode; a source electrode, a first drain electrode having an extended portion, and a first data line as an extended portion of the source electrode over the gate insulating film; a second drain electrode on the extended portion of the first drain electrode and a second data line on the first data line; an active layer made of an oxide semiconductor and on the source electrode and the first drain electrode, the active layer positioned between an opening of the source electrode and the first drain electrode and partially overlapping the source electrode and the first drain electrode, wherein a first part of the active layer and the second drain electrode are both directly on a same planar upper surface of the first drain electrode and the extended portion of the first drain electrode, and a second part of the active layer and the second data line are both directly on a same planar upper surface of the source electrode and the first data line; a protective film on the active layer; and a pixel electrode on the protective film and electrically connected to the second drain electrode, wherein: the second drain electrode is only on the extended portion of the first drain electrode; the second data line is only on the first data line; and the second drain electrode and the second data line are both spaced apart from the active layer with the protective film disposed therebetween.