Electrical fuse and method of making

摘要

A semiconductor fuse and methods of making the same. The fuse includes a fuse element and a compressive stress liner that reduces the electro-migration resistance of the fuse element. The method includes forming a substrate, forming a trench feature in the substrate, depositing fuse material in the trench feature, depositing compressive stress liner material over the fuse material, and patterning the compressive stress liner material.

主权项

1. A semiconductor device, comprising:
a fuse element comprising a neck extending between first and second contact portions; a compressive stress material that reduces an electro-migration resistance of the fuse element, wherein the compressive stress material comprises a compressive stress component imparted during deposition, and wherein the compressive stress material directly contacts the neck and the first and second contact portions; and a second material atop the compressive stress material.