发明名称 |
Methods of transferring graphene and manufacturing device using the same |
摘要 |
A method of transferring graphene includes forming a sacrificial layer and a graphene layer sequentially on a first substrate, bonding the graphene layer to a target layer, and removing the sacrificial layer using a laser and separating the first substrate from the graphene layer. |
申请公布号 |
US9056424(B2) |
申请公布日期 |
2015.06.16 |
申请号 |
US201313918066 |
申请日期 |
2013.06.14 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Wenxu Xianyu;Lee Jeong-yub;Moon Chang-youl;Park Yong-young;Yang Woo-young;Kim Yong-sung;Lee Joo-ho |
分类号 |
B44C1/17;B29C65/16;B32B37/26;B32B38/10;B32B43/00;B29C67/24;H01L51/00;H01L51/10;H01L51/44 |
主分类号 |
B44C1/17 |
代理机构 |
Harness, Dickey & Pierce, P.L.C. |
代理人 |
Harness, Dickey & Pierce, P.L.C. |
主权项 |
1. A method of transferring graphene, the method comprising:
forming a sacrificial layer and a graphene layer sequentially on a first substrate; bonding the graphene layer to a target layer; and removing the sacrificial layer using a laser to separate the first substrate from the graphene layer, wherein the removing entirely removes the sacrificial layer. |
地址 |
Gyeonggi-do KR |