Resistance-variable element and method for manufacturing the same

摘要

A resistance-variable element as disclosed has high reliability, high densification, and good insulating properties. The device provides a resistance-variable element in which a first electrode including a metal primarily containing copper, an oxide film of valve-metal, an ion-conductive layer containing oxygen and a second electrode are laminated in this order.

主权项

1. A method for manufacturing a resistance-variable element comprising the steps of:
forming a first electrode comprising copper; forming a valve-metal film on the first electrode; forming an ion-conductive layer on the valve-metal film with a gas containing oxygen, wherein the valve-metal film is oxidized to become an oxide film of valve-metal during the step of forming the ion-conductive layer; and after the step of forming the ion-conductive layer on the valve-metal film wherein the valve-metal film is oxidized to become the oxide film of valve-metal, forming a second electrode on the ion-conductive layer.