发明名称 A WEIGHT MEASUERMENT DEVICE FOR A GROWING CRYSTAL OF CRYSTAL GROWTH FURMACE
摘要 <p>The invention relates to a device for measuring a single crystal growth weight of a single crystal growth furnace. The device comprises a vertically pulling means; a sliding cantilever beam mounted on one side of the vertically pulling means to be moved upward and downward; a load cell mounted on a top surface of the sliding cantilever beam; a heating camber coupled to a lower part of the sliding cantilever beam; a driving unit coupled to an end part of the sliding cantilever beam; and a pulling bellows mounted on a lower part of a penetration unit formed in an upper surface of the heating chamber and an end part of the sliding cantilever beam; and a load cell bellows mounted between a lower surface of the driving unit and the top surface of the sliding cantilever beam.</p>
申请公布号 KR101528483(B1) 申请公布日期 2015.06.16
申请号 KR20140120195 申请日期 2014.09.11
申请人 ASE CO., LTD. 发明人 KIM, MYEONG HAK
分类号 C30B15/28;C30B15/00;C30B29/06 主分类号 C30B15/28
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