发明名称 |
A WEIGHT MEASUERMENT DEVICE FOR A GROWING CRYSTAL OF CRYSTAL GROWTH FURMACE |
摘要 |
<p>The invention relates to a device for measuring a single crystal growth weight of a single crystal growth furnace. The device comprises a vertically pulling means; a sliding cantilever beam mounted on one side of the vertically pulling means to be moved upward and downward; a load cell mounted on a top surface of the sliding cantilever beam; a heating camber coupled to a lower part of the sliding cantilever beam; a driving unit coupled to an end part of the sliding cantilever beam; and a pulling bellows mounted on a lower part of a penetration unit formed in an upper surface of the heating chamber and an end part of the sliding cantilever beam; and a load cell bellows mounted between a lower surface of the driving unit and the top surface of the sliding cantilever beam.</p> |
申请公布号 |
KR101528483(B1) |
申请公布日期 |
2015.06.16 |
申请号 |
KR20140120195 |
申请日期 |
2014.09.11 |
申请人 |
ASE CO., LTD. |
发明人 |
KIM, MYEONG HAK |
分类号 |
C30B15/28;C30B15/00;C30B29/06 |
主分类号 |
C30B15/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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