Impedance adjusting apparatus

摘要

An impedance adjustment apparatus of the invention performs impedance matching using characteristic parameters, even where a high frequency power source of variable frequencies is used. The apparatus is applicable to a power supply system using a high frequency power source of variable frequencies. Characteristic parameters obtained by targeting a portion of combinations of position information (C) of a variable capacitor and output frequency information (F) of the power source are stored in a memory. A T-parameter acquisition unit acquires characteristic parameters corresponding to (Cnow, Fnow) at the current time. An output reflection coefficient calculation unit calculates a reflection coefficient of an output end. A target information specifying unit, based on the above information and a target input reflection coefficient, specifies target combination information in which a reflection coefficient of an output end approaches the target input reflection coefficient. Impedance matching is performed based on this information.

主权项

1. An impedance adjustment apparatus that is provided between a high frequency power source and a load, and adjusts a target impedance seen from the high frequency power source to the load, the apparatus comprising:
an input end for connecting to the high frequency power source; an output end for connecting to the load; a variable electrical characteristic element; a characteristic parameter storage unit for storing a plurality of characteristic parameters indicating transmission characteristics of the impedance adjustment apparatus, the plurality of characteristic parameters being parameters that are respectively acquired for a plurality of adjustment points at which a plurality of frequency adjustment points that correspond to output frequencies of the high frequency power source are combined with a plurality of electrical characteristic adjustment points that correspond to electrical characteristics of the variable electrical characteristic element; a high frequency information detection unit for detecting high frequency information of the input end; an output frequency acquisition unit for acquiring an output frequency of the high frequency power source; an electrical characteristic acquisition unit for acquiring an electrical characteristic of the variable electrical characteristic element; a characteristic parameter acquisition unit for acquiring a characteristic parameter for an adjustment point at which the acquired output frequency is combined with the acquired electrical characteristic, based on the plurality of characteristic parameters; an output reflection coefficient calculation unit for calculating an output reflection coefficient of the output end, based on the high frequency information detected by the high frequency information detection unit and the characteristic parameter acquired by the characteristic parameter acquisition unit; a specifying unit for specifying an impedance adjustment point at which to match the target impedance to the impedance of the high frequency power source, among the plurality of adjustment points, based on the output reflection coefficient, a target input reflection coefficient set in advance, and the plurality of characteristic parameters; an electrical characteristic element adjustment unit for adjusting the electrical characteristic of the variable electrical characteristic element to an electrical characteristic of the impedance adjustment point; and a command signal output unit for outputting, to the high frequency power source, a command signal for adjusting the output frequency of the high frequency power source to an output frequency of the impedance adjustment point.