CO₂laser device and CO₂laser processing device

摘要

A CO2 laser device and a CO2 laser processing device for emitting a pulse laser having a high output and a stable beam diameter without depending on a repetition frequency. The CO2 laser device includes: laser gas being a CO2 laser medium; a near-concentric stable optical resonator in which a radius of curvature of at least one resonator mirror is set so as to be equal to a distance from an optical switch to the resonator mirror; an optical switch provided in the stable optical resonator; and transmission mirrors provided so that laser light generated from the stable optical resonator passes through the CO2 laser medium again.

主权项

1. A CO2 laser device, comprising:
a CO2 laser medium formed in a cuboid form discharge space and moved circularly in the discharge space by forced convection; an optical resonator, in which the CO2 laser medium is interposed; an optical switch provided in the optical resonator; and a transmission mirror for reflecting laser light output from the optical resonator to outside of the optical resonator, wherein the optical resonator comprises a near-concentric stable optical resonator, wherein the optical resonator comprises a first resonator mirror and a second resonator mirror, and the optical resonator is for extracting the laser light from the CO2 laser medium, wherein a radius of curvature of the first resonator mirror is set so as to be equal to a distance from the optical switch to the first resonator mirror, wherein, in the optical resonator, the CO2 laser medium is disposed only between the optical switch and the first resonator mirror, wherein the optical switch is disposed on an optical axis between the first resonator mirror and the second resonator mirror so as to be disposed at a position on the second resonator mirror side at a position where the beam diameter of the laser light which passes between the first resonator mirror and the second resonator mirror is thinnest, and wherein the transmission mirror receives said laser light transmitted through the first resonator mirror and reflects the received laser light so that the laser light passes through the CO2 laser medium again.