压印方法和压印设备，样品拍摄撷取方法和使用上述方法设备的物品制造方法;IMPRINTING METHOD AND IMPRINTING APPARATUS, SAMPLE SHOT EXTRACTION METHOD, AND ARTICLE MANUFACTURING METHOD USING SAME

摘要

所提供者为一压印方法，其系能够为每一拍摄严格地施行待施加至基板之未固化树脂材料的施加分布之内插、以及为每一拍摄有效率地施行该未固化树脂材料的施加分布之再次内插，同时减少生产步骤中之工作量。本发明之压印设备包括模子(20)，模子图案系形成在该模子上；模子驱动单元(14)，其允许该模子(20)移动朝向基板(30)与远离基板(30)；分配器(17)，其将未固化树脂材料施加至该基板(30)；光源(19)，其固化该未固化树脂材料当作树脂图案；分配器控制单元(43)，其用于复数拍摄之每一者藉由对该树脂图案产生该未固化树脂材料之施加分布来控制该分配器(17)；及主要控制单元(40)，其使用拍摄布局资讯来内插该未固化树脂材料之施加分布，该施加分布已藉由该分配器控制单元(43)所产生，该拍摄布局资讯考虑复数拍摄位置、该分配器(17)、及相对于该基板(30)之光源(19)之中的相对位置当作变数。; a mold driving unit 14 that allows the mold 20 move toward and away from a substrate 30; a dispenser 17 that applies an uncured resin material to the substrate 30; a light source 19 that cures the uncured resin material as a resin pattern; a dispenser control unit 43 that controls the dispenser 17 by generating the application distribution of the uncured resin material to the resin pattern for each of a plurality of shots; and a main control unit 40 that interpolates the application distribution of the uncured resin material, which has been generated by the dispenser control unit 43, using shot layout information in consideration of the relative position among the positions of a plurality of shots, the dispenser 17, and the light source 19 with respect to the substrate 30, as variables.