Method for measuring current, method for inspecting semiconductor device, semiconductor device, and test element group

摘要

An object is to provide a current measurement method which enables a minute current to be measured. To achieve this, the value of a current flowing through an electrical element is not directly measured, but is calculated from a change in potential observed in a predetermined period. The detection of a minute current can be achieved by a measurement method including the steps of applying a predetermined potential to a first terminal of an electrical element comprising the first terminal and a second terminal; measuring an amount of change in potential of a node connected to the second terminal; and calculating, from the amount of change in potential, a value of a current flowing between the first terminal and the second terminal of the electrical element.

主权项

1. A method for measuring current, comprising the steps of:
applying a predetermined potential to a first terminal of an electrical element comprising the first terminal and a second terminal for a period; measuring an amount of decrease in potential over time of the period of a node connected to the second terminal while a potential of the first terminal is fixed and a potential of the second terminal is floating; and calculating, from the amount of decrease in potential, a value of a current flowing between the first terminal and the second terminal of the electrical element.